O.[O-]CCCC.[O-]CCCC.[O-]CCCC.[Al+3:17].C(OCC)(=O)CC(OCC)=O.[CH3:29][CH:30]([O:34][C:35]([CH3:37])=[O:36])[CH2:31][O:32][CH3:33]>C(O)(C)C>[CH3:29][CH:30]([O:34][C:35]([CH3:37])=[O:36])[CH2:31][O:32][CH3:33].[Al:17]A mixture of purified water (1.8 g) and isopropyl alcohol (40 g) was dropped to a mixture of aluminum tributoxide (24.6 g), isopropyl alcohol (60 g) and diethyl malonate (16 g). After completion of dropping, the mixture was agitated for 2 hours, subjected to hydrolytic condensation and heated to reflux for 2 hours. PGMEA (200 g) was added thereto and was concentrated under reduced pressure to obtain a PGMEA solution of an aluminum-containing condensate (B-III) (150 g). The solid content concentration of the aluminum-containing condensate was 9.9%.
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