反应详情

Subsequently, 5.78 g of 2-cyclohexylethyl vinyl ether as the vinyl ether compound and 1.45 g of 2% camphorsulfonic acid (PGMEA solution) were added to Solution p-1, and the mixture was stirred at room temperature for 4 hours. After 1.05 g of 6% triethylamine (PGMEA solution) was added and the mixture was stirred for a while, the reaction solution was transferred to a separating funnel containing 165 mL of ethyl acetate, and the organic layer was washed with 200 mL of distilled water three times. The organic layer was concentrated by an evaporator to remove ethyl acetate, and this reaction solution was added dropwise in 2 L of hexane. A part of the obtained precipitate was sampled for NMR measurement, and the remaining was dissolved in 70 g of PGMEA. From the obtained solution, the low boiling point solvent was removed by an evaporator to obtain 105.6 g of a PGMEA solution (32.7 mass %) of Resin (P-1).

1. stirringthe mixture was stirred for a while
2. customthe reaction solution was transferred to a separating funnel
3. washthe organic layer was washed with 200 mL of distilled water three times
4. concentrationThe organic layer was concentrated by an evaporator
5. customto remove ethyl acetate
6. additionthis reaction solution was added dropwise in 2 L of hexane
7. aliquotA part of the obtained precipitate was sampled for NMR measurement
8. dissolutionthe remaining was dissolved in 70 g of PGMEA
9. customFrom the obtained solution, the low boiling point solvent was removed by an evaporator